Parallel array of planar Hall effect sensors for high resolution magnetometry
نویسندگان
چکیده
We introduce a planar Hall effect magnetometer in the form of parallel array permalloy-based elliptical sensors. The number ellipses and other fabrication parameters are optimized with support numerical simulations. obtain equivalent magnetic noise (EMN) 16 pT/Hz at 100 Hz, 25 10 98 1 470 0.1 Hz. exceptional EMN without use flux concentrators highlights advantages design. presented magnetometer, characterized by its simplicity, affordability, ability to operate room temperature, is anticipated be useful for applications requiring pT resolution.
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2023
ISSN: ['1089-7550', '0021-8979', '1520-8850']
DOI: https://doi.org/10.1063/5.0151569